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Semiconductor industry - clean room AMC monitoring

Airborne molecular contamination (AMC) is a concern for high-tech manufacturing processes, especially in the microelectronics industry and the production of semiconductors. Organic contamination can cause adverse effects on production tools and consequently increase costs. Contamination-free manufacturing is a viable goal and is achieved by source control and source monitoring in combination with filtration solutions in air handling systems and at the tool-level. Permanent monitoring of the AMC level helps to identify sources, stabilizes production and prevents unexpected shortfalls of the service life of filtration units.

IONICON, with its ultra-sensitive real-time trace gas monitoring solutions, provides powerful tools to detect organic contamination and to continuously monitor clean-room environments as well as the production tools.

Results of PTR-MS measurements - clean room environment testing

PTR-MS has the ability to continuously monitor for AMC with real-time detection limits as low as 1 pptv.
The level of AMC contamination in cleanroom environments is predominately created by internal sources such as spills or leaks of solvents, acetic acid, re-entrainment of exhaust air, aromatic compounds from ambient air and return air as well as material outgassings or even the FOUPs that are used for wafer transport. Organic contamination can cause substantial costs in terms of wafer damage or loss and tool down-time.

PTR-MS can monitor production-critical compounds like phosphates, phthalates and other VOCs. Incidents that can cause production failures and yield losses, can immediately be detected online. Corrective actions can be taken to optimize the processes.

Related Documents

Airborne molecular contamination (AMC) are a concern for high-tech manufacturing processes. PTR-MS can monitor these contaminations continuously and in real-time.

AMC Clean-room Monitoring

Monitoring of volatile organic contamination in clean-room environments